Design and Fabrication of Topologically Optimal Miniature Microgripper Integrated with an Electro-Thermal Microactuator
نویسندگان
چکیده
This paper presents a topological-optimization method which applies the theory of ground structure parameterization to design and analyzes a microgripper device. The study defines the compliant design domain as 2000μm×2000μm with a 200μm thickness, and discusses the effect of different optimization parameters. The driver is an electro-thermal microactuator that can actuate approximately 6000μN of output force to the displacement amplifier. Finally, the microgripper tip deflects up to 18μm when 1.5V is applied.
منابع مشابه
Design, numerical simulation and experimental investigation of an SU-8 microgripper based on the cascaded V-shaped electrothermal actuators
This paper presents the numerical simulation results and the experimental investigations of a polymeric microgripper designed using the cascaded V-shaped electrothermal actuators. The microgripper was simulated using electro-thermo-mechanical finite element method (FEM) based on Coventorware 2014 software in order to check the performance of the gripper. As structural material of the microgripp...
متن کاملMicromechanical Structures for Photonic Crystal Waveguide Switches
We report design and fabrication process of MEMS (Micro Electro Mechanical Systems) actuators for a new type of optical switch integrated with photonic crystal (PhC) waveguides. Thin film poly-silicon electrostatic microactuator (either a cantilever or a bridge style) is placed over a PhC waveguide to induce optical modulation by means of mechanical motion in the evanescent fields. For low volt...
متن کاملMetallic microgripper with SU-8 adaptor as end-effectors for heterogeneous micro/nano assembly applications
This paper presents design, fabrication, and characterization of easy-to-handle electroplated nickel microgrippers with SU-8 adaptors for heterogeneous micro/nano assembly applications. Two distinctive designs of microgrippers as end-effectors of micro/nano assembly applications have been developed in this work. The first design is 200 lm thick electroplated nickel microgripper with a plastic m...
متن کاملOptimal Design of a Shape Memory Alloy Actuator for Microgrippers
In this paper, a modular microactuator based on shape memory alloy (SMA) actuation to drive the joints of a microgripper is described. Its design is a combination of two SMA actuators installed on the links of a special mechanism : one of them drives the rotation of the joint and the other one produces the necessary force to manipulate objects. An accurate model of the thermo-mechanical behavio...
متن کاملSimulation of a Microgripper with Electrothermal Actuator Using COMSOL Software Based on the Finite Element Method
Micro-electro-mechanical systems (MEMs) are Combination of electrical and mechanical components in Micron dimensions. In recent years, holding, actuating methods and handling of MEMs components such as microgripper, microsensors and etc. have been deeply studied. Microgrippers for handling, positioning and assembling of micro components are very useful so that for clamping need actuation create...
متن کامل